Micro-coils for MR spectroscopy by deep silicon etching

Micro-Coils for MR Spectroscopy by Deep Silicon Etching

A process for batch fabrication of low-cost microcoils for magnetic resonance spectroscopy is demonstrated. Conductors are fabricated on oxidised silicon substrates by electroplating metals inside a deep photoresist mould, and passivated using an epoxy-based resist. Through-wafer deep reactive ion etching is used to define sample volumes and stencil cuts around each die, and dies are separated ...

Cryogenic Deep Reactive Ion Etching of Silicon Micro and Nanostructures

OF DOCTORAL DISSERTATION HELSINKI UNIVERSITY OF TECHNOLOGY P.O. BOX 1000, FI-02015 TKK

Microengineered needle micro-coils for magnetic resonance spectroscopy

A process for batch fabrication of low-cost needle-shaped micro-coils for magnetic resonance (MR) spectroscopy is demonstrated. The conductors are embedded inside a cross-section designed to avoid the signal cancellation effects that can occur with completely immersed detectors. Simple models are developed for the sensitivity of an immersed coil and for the electrical performance of coils on si...

Numerical Simulation of Bosch Processing for Deep Silicon Plasma Etching

We present a simulation of the Bosch process using the feature-scale modeling software FPS3D. FPS3D is a generic simulator that can be applied to any set of materials, plasmas, reactive gases, and reactions for both 2D and 3D simulations of etching and deposition. FPS3D can simulate multi-time-step processes for which the fluxes, species, reactions, ion energies, angular distributions, and othe...

Dislocations in laser-doped silicon detected by micro-photoluminescence spectroscopy